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Gas

Handling Products

  • ▫ Oxygen : O2
  • ▫ Nitrogen : N2
  • ▫ Argon : Ar
  • ▫ Hydrogen : H2
  • ▫ Carbon Dioxide : CO2
  • ▫ Acetylene : C2H2
  • ▫ Helium : He
  • ▫ Ammonia : NH3
  • ▫ Nitrous Oxide : N2O
  • ▫ O2, H2
  • ▫ Mixed Gas(for cutting and welding)
  • ▫ Others
공급방식
  • Storage tank
    4.9ton / 10ton / 15ton / 20ton / 30ton / 40ton / 50ton / Others
운송장비
  • Tank Lorry
  • Trailer
공급규모
  • Around 130,000ton / year
Packaged Delivery System
  • Supply Method
    LGC, cylinder (40liter, 47liter, 58liter, others)
  • Transport equipment: trailer, truck

Handling products

  • ▫ Propane : C3H8
  • ▫ N-Butane : C4H10
  • ▫ Propane : C3H8
  • ▫ Flamex
  • ▫ ISO Butane : C4H10
  • ▫ Methane : CH4
  • ▫ Ethane : C2H6
  • ▫ Others
공급방식
  • Storage tank
    500Kg / 1.0ton / 1.9ton / 2.9ton / 4.9ton / 10ton / 15ton / 20ton / 50ton / Others
  • Small storage tank, container (20Kg / 50Kg /others)
운송장비
  • Tank Lorry
  • Trailer
  • Bulk Lorry
  • Truck
공급규모
  • Around 50,000ton / year
기술 지원
  • Purge : Purge work, leak detection, gas purge work
  • Safety mgt agency & facility safety diagnosis
  • Gas facility consulting and technology review agency

Handling products

  • Semiconductor Gases

  • ▫ HCI, SiHCl3, SiH2Cl2
  • ▫ CF4, C2F6, CHF3, C3F6, C4F8
  • ▫ PH3, AsH3
  • ▫ BCl3
  • ▫ Cl2
  • ▫ SF6(Sulfur Hexafluoride)
  • ▫ NH3(Ammonia)
  • ▫ HBr(Hydrogen Bromide)
  • ▫ H2S
  • ▫ STC

  • Mixture Gases

  • ▫ GeH4(Germane Mixtures)
  • ▫ B2H6(Diborane Mixtures)
  • ▫ SiH4(Silane Mixtures)
  • ▫ PH3(Phosphine Mixtures)
  • ▫ HCl

  • Electronic Material Gases

  • ▫ TCS
  • ▫ DCS
  • ▫ Chemical Precusor(CVD/ALD)
  • ▫ Chemical basic material
기술연구소
  • Analysis equipment
    GC PDD, ICP-MS, Moisture analyzer, Micro Oxygen Analyzer, THC
  • Clean Room : 75M2

Handling products

  • ▫ Oxygen : O2
  • ▫ Nitrogen : N2
  • ▫ Argon : Ar
  • ▫ Carbon Monoxide : CO
  • ▫ Carbon Dioxide : CO2
  • ▫ Helium : He
  • ▫ Nitrous Oxide : N2O
  • ▫ Excimer Laser Gas
  • ▫ Sterilization gas
  • ▫ Cardio pulmonary function and
    breathing measurement gas
  • ▫ Operation: extra-high voltage He,
    extra-high voltage Ar
  • ▫ Others

의료용 가스

의료용 가스

Handling products

  • Standard gas, Multicomponent mixture gas (ultra precision weight method)

  • ▫ for green gas measurement
  • ▫ for environment measurement
  • ▫ for process measurement
  • ▫ Laser measurement(medical service sector, semiconductor sector)
  • Analysis Service

  • ▫ FT-IR
  • ▫ GC/MSD
  • ▫ GC/TCD/FID-Methanator
  • ▫ GC/FID
  • ▫ GC/PDD
  • ▫ ICP-OES
  • ▫ THC Analyzer
  • ▫ Trace Oxygen Analyzer
  • ▫ Moisture Analyzer
  • ▫ Ultra-Precision Balance :
    Cap. 26kg, Readability 1mg

Differentiated production system

차별화 생산시스템

Products analysis system

제품 분석시스템

MS머트리얼즈
Classification Component Container
Standard
Container
Material
Valve
Standard
Charging
Condition
Quality Analysis
Ultra High
Purity oxygen
(H805)
Oxygen 99.999%(min)
Moisture    <3ppm
T.H.C           <0.1ppm
Nitrogen     <2.5ppm
47L Mn Steel Standard type
Pressure Seal
Ni Coated
W-23-14-R
120kg/cm2
@35℃
Moisture Analyzer
GC-PDD
Ultra High
Purity
hydrogen
(H106)
Hydrogen 99.9995%(min)
Moisture     <2.5ppm
T.H.C         <0.1ppm
Nitrogen     <2.0ppm
47L Mn Steel Standard type
Pressure Seal
Ni Coated
W-22-14-L
120kg/cm2
@35℃
Moisture Analyzer
Oxygen Analyzer
GC-PDD